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Automated Wafer Handler

Features

Cleanroom Class 1000 (ISO 6)
HEPA filter
Automated wafer handling effector arm
Interchangable end effector arm
Wafer cassette slot mapping
Wafer aligner
User friendly HMI touch screen
SECS/GEM communication (Optional)
SEMI S2/S8 compatibility (Optional)
Wafer inverting option (Optional)
External stand-alone wafer load port to support AIV/AGV loading or unloading (Optional)

Description

This unit is used for wafer sorting, wafer mapping, wafer loading & unloading, and wafer aligning.

Specifications

Model No.	Size	Machine Dimension (mm) L x W x H	Fixed Point to Front Dimension (X)	Weight (Approximately)
NTM8030W		1800 x 2010 x 2020 mm	545 mm	920 kg

Model No.	NTM8030W
Size
Machine Dimension (mm) L x W x H	1800 x 2010 x 2020 mm
Fixed Point to Front Dimension (X)	545 mm
Weight (Approximately)	920 kg

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