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Wafer Loading Handler

Features

  • Cleanroom Class 1000 (ISO 6)
  • HEPA filter
  • Touch screen panel enables swift adjustment for various types of cassette
  • Automated wafer handling effector arm
  • Wafer casette slot mapping
  • FOUP opener
  • Wafer aligner and OCR Features (Optional)
  • Loading/unloading by AIV/AGV (Optional)
  • OHT/AMHS integration (Optional)
  • RFID tracking (Optional)
  • SECS/GEM communication (Optional)
  • SEMI S2/S8 compatibility (Optional)

Description

This unit is used for loading of wafer.

Specifications

Model No.NTM8020LW
Size
Machine Dimension (mm)
L x W x H		1650 x 1690 x 2230 mm
Fixed Point to Front
Dimension (X)		1180 mm
Weight
(Approximately)		860 kg

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