The Automated Wafer Handler is used for wafer sorting, wafer mapping, wafer loading & unloading, and wafer aligning.

Features

• Cleanroom Class 1000 (ISO 6)
• Automated wafer handling effector arm
• Wafer cassette slot mapping
• Wafer aligner
• User friendly HMI touch screen
• HEPA filter (Optional)
• Touch screen monitor (Optional)
• SECS/GEM communication (Optional)
• SEMI S2/S8 compatibility (Optional)
• External stand-alone wafer load port to support AIV/AGV loading or unloading (Optional)