This unit is used for unloading of substrates, leadframes or carriers.
Automated Wafer Handler
The Automated Wafer Handler is used for wafer sorting, wafer mapping, wafer loading & unloading, and wafer aligning.
Features
- Cleanroom Class 1000 (ISO 6)
- Automated wafer handling effector arm
- Wafer cassette slot mapping
- Wafer aligner
- User friendly HMI touch screen
- HEPA filter (Optional)
- Touch screen monitor (Optional)
- SECS/GEM communication (Optional)
- SEMI S2/S8 compatibility (Optional)
- External stand-alone wafer load port to support AIV/AGV loading or unloading (Optional)
Specification
| Model No. |
Machine Dimension (mm) L x W x H |
Weight (Approximately) |
| NTM8050W | 1766 x 1256 x 1672 mm | 600 kg |
Related Products
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The Stack Leadframe/Magazine Loader is used for loading of substrates, leadframes or carriers. -
The Wafer Loading Handler is used for loading of wafer. -
This unit is used for loading of substrates, leadframes or carriers.