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Automated Wafer Handler

The Automated Wafer Handler is used for wafer sorting, wafer mapping, wafer loading & unloading, and wafer aligning.

 

Features

  • ​Cleanroom Class 1000 (ISO 6)
  • HEPA filter
  • Automated wafer handling effector arm
  • Interchangable end effector arm
  • Wafer cassette slot mapping
  • Wafer aligner
  • User friendly HMI touch screen
  • SECS/GEM communication (Optional)
  • SEMI S2/S8 compatibility (Optional)
  • Wafer inverting option (Optional)
  • External stand-alone wafer load port to support AIV/AGV loading or unloading (Optional)

Specification

Model No.

Machine Dimension (mm)


L x W x H

Fixed Point to Front

Dimension (X)

Weight


(Approximately)

NTM8030W 1800 x 2010 x 2020 mm 545 mm 920 kg