The Multiple Lane Advanced Platform Unloader is used for unloading of substrates, leadframes or carriers in multiple lane production line.
Automated Wafer Handler
The Automated Wafer Handler is used for wafer sorting, wafer mapping, wafer loading & unloading, and wafer aligning.
Features
- Cleanroom Class 1000 (ISO 6)
- HEPA filter
- Automated wafer handling effector arm
- Interchangable end effector arm
- Wafer cassette slot mapping
- Wafer aligner
- User friendly HMI touch screen
- SECS/GEM communication (Optional)
- SEMI S2/S8 compatibility (Optional)
- Wafer inverting option (Optional)
- External stand-alone wafer load port to support AIV/AGV loading or unloading (Optional)
Specification
| Model No. |
Machine Dimension (mm) L x W x H |
Fixed Point to Front Dimension (X) |
Weight (Approximately) |
| NTM8030W | 1800 x 2010 x 2020 mm | 545 mm | 920 kg |
Related Products
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The Dual Lane Advanced Platform Loader is used for loading of substrates, leadframes or carriers in dual lane production line. -
This unit is used for unloading of substrates, leadframes or carriers. -
The Advanced Platform Wafer Loader is used for loading of 8” & 12” wafer.