This unit is used for unloading of 8” & 12” wafer.
Wafer Loading Handler
The Wafer Loading Handler is used for loading of wafer.
Features
- Cleanroom Class 1000 (ISO 6)
- HEPA filter
- Touch screen panel enables swift adjustment for various types of cassette
- Automated wafer handling effector arm
- Wafer casette slot mapping
- FOUP opener
- Wafer aligner and OCR Features (Optional)
- Loading/unloading by AIV/AGV (Optional)
- OHT/AMHS integration (Optional)
- RFID tracking (Optional)
- SECS/GEM communication (Optional)
- SEMI S2/S8 compatibility (Optional)
Specification
| Model No. |
Machine Dimension (mm) L x W x H |
Fixed Point to Front Dimension (X) |
Weight (Approximately) |
| NTM8020LW | 1650 x 1690 x 2230 mm | 1180 mm | 860 kg |
Related Products
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The Automated Wafer Handler is used for wafer sorting, wafer mapping, wafer loading & unloading, and wafer aligning. -
The Advanced Platform Wafer Loader is used for loading of 8” & 12” wafer. -
The Platform Unloader is used for unloading of substrates, leadframes or carriers.