The Wafer Unloading Handler is used for unloading of wafer.

Features

• Cleanroom Class 1000 (ISO 6)
• HEPA filter
• Touch screen panel enables swift adjustment for various types of cassette
• Automated wafer handling effector arm
• Wafer casette slot mapping
• FOUP opener
• Wafer aligner and OCR Features (Optional)
• Loading/unloading by AIV/AGV (Optional)
• OHT/AMHS integration (Optional)
• RFID tracking (Optional)
• SECS/GEM communication (Optional)
• SEMI S2/S8 compatibility (Optional)